Gas Analyzer

TF-21D201, TF-30D301, SH-201, SH-301

ZIRCONIA MICRO OXYGEN ANALYZER

Introduction

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Principle

TF-21D201 using NGK thick film sensor technology is the sensor that uses the maximum capacity of zirconia concentration cell.

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Features

  • Extremely small sensor enabling measuring in % and 0-10ppm range.
  • Foot space reduced by separating probe and receiver.
  • Swedgelock fitting enables easy and positive sensor connection.
  • Thick film sensor conforming to the specifications for vacuuming such as load locking.
  • Four measuring ranges in % and 0-10ppm selectable.
  • Range switching with local/remote/auto range selections.
  • Free NC/NO upper and lower alarm setting.
  • Extremely resistant to organic silicone with special treatment.

Applications

  • TF-21D201:Semiconductor manufacturing facilities, diffusion furnaces, RTP, various N2 furnace environments measuring, air separators.
  • TF30D201:Reflow, ferrite sintering ovens,various environment control, and combustion control.

( * ) The products of gas analysis category are manufactured and sold by Energy Support Corporation, NGK group company. Please inquire by the contact form.

Inquiry about Gas Analyzer

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