Ceramic Membranes & Separators

The Antistatic System for Ultrapure Water (MEGCON)

"MEGCON Ⅱ+" is the equipment that controls the resistivity value of ultrapure water by dissolving carbon dioxide gas in ultrapure water through special hollow-fiber membrane.

Overview

In the precision cleaning of semiconductor products, ultrapure water is used that is almost free of ion component. Therefore, static electricity can easily generate and the following errors cause product defect.

  • Destruction of substrate circuit (ESD damage)
  • Particle reattachment

With MEGCONⅡ+, by reducing the resistivity value of ultrapure water and giving it conductivity,
it is possible to prevent defects caused by this static electricity.

Applications

  • Dicing process
  • High Pressure jet cleaning
  • Scrubber cleaning
  • Liquid crystal process
  • Mask and reticle cleaning

Features

  • 1.Low risk of particle contamination and small amount of CO2 gas consumption
  • Possible to control even in the case of small flow rate
  • Low pressure loss
  • Automatic control of resistivity value
  • Line-up large flow rate models

Principle

Control the resistivity value of ultrapure water by dissolving carbon dioxide gas in ultrapure water through special hollow-fiber membrane.

Total systems for medical/pharmaceutical water

MEGCONⅡ+ "PRC Series" Model and Specifications

SeriesCabinet type>Air pump built-in type "PRCⅡ+ - (Below model number)"
Model Standard 1000ACD 1200ACD 2000ACD 1220ACD 2040ACD
S type*2 1000ACD-S 1200ACD-S 2000ACD-S 1220ACD-S 2040ACD-S
Performance Max. flow rate L/hr 1000 1000 2000 2000 4000
Control area *1 MΩ·cm 0.2-2.0 0.1-0.5 0.2-2.0 0.15-1.0 0.2-2.0
Dimensions Standard 520W×400D×1150H mm
S type *2 520W×400D×1415H mm
Weight Standard 65kg 70kg
S type *2 66kg 71kg
Wetted part Cell (carbon dioxide gas induction part) : PP Cell (carbon dioxide gas induction part) : PP
Material Piping : PVC, blade hose Piping : PVC
Ultrapure water Connection gauge Rc1/2 Rc3/4 Rc1 1/4
Utility Ultrapure water Pressure : Regular 0.35MPa and below (Max 0.45MPa and below) / Temperature : 5~35°C / Water : 10MΩ·cm and above
CO2gas Pressure : 0.1~0.2MPa / Temperature : 5~35°C / Ultrapure water : 99.5% and above
Dry air (for membrane drying) Not required because air pump is built-in
Electric power source AC100-240V (50/60Hz)
Standard accessory Instructions manual, test report
AC100-120V : Electric power cord 2.8m(with plug)
AC200-240V : Electric power cord 5m(without plug)
SeriesRack typeAir pump built-in type "PRCⅡ+ - (Following model number)"
External air supply type "FRCⅡ+ - (Following model number)"
Model 1000AD 1200AD 2000AD 1220AD
Performance Max. flow rate L/hr 1000 1000 2000 2000
Control area*1 MΩ・cm 0.2-2.0 0.1-0.5 0.2-2.0 0.15-1.0
Dimensions 480W×355D×200H mm
Weight 15kg
Wetted part Cell(carbon dioxide gas induction part): PP
Material Piping : PVC,blade hose
Ultrapure water connection gauge Nozzle for hose(IDφ19 for blade hose)
Utility Ultrapure water Pressure : Regular 0.35MPa and below (Max 0.45MPa and below) / Temperature : 5~35°C / Water : 10MΩ·cm and above
CO2gas Pressure : 0.1~0.2MPa / Temperature:5~35°C / Ultrapure water:99.5% and above
Dry air(for membrane drying) "PRC" series : Not required because air pump is built-in
"FRC" series : 0.1~0.2MPa
Electric power source AC100-240V (50/60Hz)
Standard accessory Instructions manual, test report
AC100-120V : Electric power cord 2.8m(with plug)
AC200-240V : No cord(please connect to the terminal)

*1 : Maximum resistivity value is the value achieved when the flow rate is about 500L/hr.
*2 : -S type includes a 2-color lamp with buzzer + caster with levelers.

* Water Pressure : Regular 0.35MPa (Maximum 0.45MPa and below).
* The specifications and other information listed here may be changed without notice.

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