Hi-Performance Ceramics Business

NGK's Hi-Performance fine ceramics deliver innovations in semiconductor manufacturing.

Overview

Heaters and electrostatic chucks for semiconductor manufacturing processes

Fine ceramics are materials that deliver useful properties beyond metals and plastics, including greater strength, corrosion resistance, and heat resistance.

NGK makes the most of these properties across a wide range of industries. Through products like heaters and electrostatic chucks that realize dramatic innovations in semiconductor manufacturing processes, we're making the most of the limitless possibilities of fine ceramics.

Advantages

Chemical vapor deposition (CVD) and etching processes are essential stages of semiconductor manufacturing. The component used in these processes must be able to hold silicon wafers, heat them uniformly, and protect them from corrosion caused by gases and plasma. To meet these needs, NGK makes the most of the distinctive properties of various materials, including aluminum nitride (AlN) ceramics, to deliver products such as electrostatic chucks, heaters, and various other components used in semiconductor manufacturing equipment.

Product lineup

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