Products

Components

Overview

Components

Various shapes of ceramic components are available with advanced technology.

Properties

Aluminum Nitride

  • High purity(~99.9%)
  • High thermal conductivity (~ 170W/mK)
  • High corrosion and plasma resistance

[Products]

Shaft, Tube, Susceptor ring

Aluminum oxide

  • High purity (~ 99.9%)
  • High corrosion and plasma resistance
  • Complicated shape
  • Large shape

[Products]

Ring, Arm

Featured Products

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