Products

Components

Product tags：

Overview

Components

Various shapes of ceramic components are available with advanced technology.

Properties

Aluminum Nitride

  • High purity（～99.9%）
  • High thermal conductivity (~ 170W/mK)
  • High corrosion and plasma resistance

[Products]

Shaft, Susceptor ring

Aluminum oxide

  • High purity (~ 99.9%)
  • High corrosion and plasma resistance
  • Complicated shape
  • Large shape

[Products]

Ring

Featured Products

Ceramic heaters

Using highly heat-conductive AlN, these heaters deliver outstanding temperature consisency through the uniform sintering of resistance-heating elements and significantly reduce metallic contamination and impurities.

Learn more

Electrostatic chucks

Electrostatic chucks demonstrate high strength, heat conductivity, and heat and shock resistance. Thanks to our proprietary volume resistivity control technologies, these chucks are compatible with a wide range of temperatures.

Learn more

Inquiry about Ceramics for Semiconductor Manufacturing

Please apply with the contact form and give us your comments or questions.

Contact

Business fields Application Keywords