Automatic Pusher Kiln
Examples of stable kiln internal atmospheres
|Semiconductor capacitor||H2 + N2|
|Varistor||H2 + N2|
|Tungsten metallization||H2 + N2|
Uniform temperature and atmosphere
These kilns can maintain a stable internal atmosphere. Because gas can also be supplied from the bottom of the kiln between the rows, this reduces the temperature and atmosphere variation in the up/down and left/right directions.
Capable of mass production
Because the kiln uses multi-level transport, it is capable of mass production with improved surface area productivity. By using it together with tools that have good thermal conductivity, it is possible to shorten the profile.
Uniform gas flow
Special labyrinth structure
Oxygen concentration distribution
Producing a uniform gas flow results in little variation in the oxygen concentration or temperature distribution, allowing a uniform atmosphere to be maintained inside the kiln.